Specifications of System Sensors

Surface Profiling

Depth of Field	20 microns	350 microns	3000 microns
Focal Length	5 mm	9.5 mm	45 mm
Working Distance	0.6 mm	12 mm	38 mm
Z-axis resolution	1 nm	10 nm	100 nm
Accuracy	10 nm	0.1 microns	1 micron
Spot diameter	1 micron	1.5 microns	10 microns
Lateral resolution	0.5 microns	0.75 microns	5 microns
Numerical aperture	0.69	0.5	0.26
Maximum angular slope -diffusing surface -specular surface	89º 44º	89º 30º	89º 15º
Effective range in material with nd=1.5	30 microns	525 microns	4.5 mm
Minimum thickness of layer	12 microns	30 microns	220 microns

Address:
Photonics Cluster (UK)
Faraday Wharf
Holt Street
Birmingham Science Park Aston
Birmingham B7 4BB

Phone:
+44 (0) 121 260 6020
Fax:
+44 (0) 121 260 6450

Email:
info@photonics
cluster-uk.org

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